UNE-EN ISO 14644-6:2008

Salas limpias y locales anexos controlados. Parte 6: Vocabulario (ISO 14644-6:2007)

Cleanrooms and associated controlled environments - Part 6: Vocabulary (ISO 14644-6:2007)

Salles propres et environnements maîtrisés apparentés - Partie 6: Vocabulaire (ISO 14644-6:2007)